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Research Achievements

6-DOF motion error measurement

작성자Youyoung  조회수873 Date2019-07-01
Design and construction of a single unit multi-function optical encoder
for a six-degree-of-freedom motion error measurement
in an ultraprecision linear stage
 - ChaBum Lee, Gyu Ha Kim and Sun-Kyu Lee -

Graphical Abstract
 


Highlights

A novel method of a six-degree-of-freedom (DOF) posture measurement in a linear stage by employing a single unit of an optical encoder is introduced.

This method consists of a diffractive optical element, a corner cube, four separate two-dimensional position-sensitive detectors, four photodiodes and auxiliary optics components

The circularly polarizing interferometric technique was integrated to measure the displacement of the stage along the traveling axis in a robust manner.

With a single travel of the stage, it provided a six-DOF motion error with a high resolution, less than 0.03 arcsec, 20 nm and 0.4 nm for angular errors, dY and dZ, and dX, respectively, at the same time.

Reference

Aug, 2011
Measurement Science and Technology, Vol.22, 105901

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